IEEE - Institute of Electrical and Electronics Engineers, Inc. - Multi-Functioning AFM Cantilever for Mechanical Tests: Indentation, Strip Bending and Adhesion Tests

19th IEEE International Conference on Micro Electro Mechanical Systems

Author(s): Hak-Joo Lee ; Kiho Cho ; Jae-Hyun Kim ; Jong-Man Kim ; Yong-Kweon Kim ; Chang-Wook Baek
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2006
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 22 January 2006
Page(s): 218 - 221
ISBN (Paper): 0-7803-9475-5
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2006.1627775
Regular:

This paper reports on the development of a novel AFM cantilever and its application to various mechanical tests for characterizing micro/nano-structures. We have designed and fabricated... View More

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