IEEE - Institute of Electrical and Electronics Engineers, Inc. - 20nm gate bulk-finFET SONOS flash
International Electron Devices Meeting 2005
Author(s): | Jiunn-Ren Hwang ; Tsung-Lin Lee ; Huan-Chi Ma ; Tzyh-Cheang Lee ; Tang-Hsuan Chung ; Chang-Yun Chang ; Sheng-Da Liu ; Baw-Ching Perng ; Ju-Wang Hsu ; Ming-Yong Lee ; Chih-Yuan Ting ; Chien-Chao Huang ; Ji-Hua Wang ; Jyu-Horng Shieh ; Fu-Liang Yang |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 January 2005 |
Conference Location: | Washington, DC, USA |
Conference Date: | 5 December 2005 |
Page Count: | 4 |
Page(s): | 154 - 157 |
ISBN (Paper): | 0-7803-9268-X |
DOI: | 10.1109/IEDM.2005.1609293 |
Regular:
High-performance FinFET SONOS (silicon-oxide-nitri