IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of One-Dimensional Photonic Crystal with Large Dispersion in SiO₂ Glass Substrate Using Deep Dry Etching Technique

International Conference on MEMS, NANO and Smart Systems

Author(s): K. Oya ; T. Nakazawa ; S. Kittaka ; K. Tsunetomo ; K. Kintaka ; J. Nishii ; K. Hirao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2004
Conference Location: Banff, AB, Canada, Canada
Conference Date: 25 August 2004
Page(s): 366 - 368
ISBN (Paper): 0-7695-2189-4
DOI: 10.1109/ICMENS.2004.1508977
Regular:

Binary gratings with high first-order transmission diffraction efficiency were covered with a thin SiO₂ film without the filling in the grooves by plasma enhanced chemical vapor deposition.... View More

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