IEEE - Institute of Electrical and Electronics Engineers, Inc. - Photonic crystal waveguide characterisation for MEMS applications

2003 IEEE/LEOS International Conference on Optical MEMS

Author(s): M.G. Salt ; I. Maerki ; S. Gautsch ; F. Schaedlin ; U. Staufer ; H.P. Herzig
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Waikoloa, HI, USA, USA
Conference Date: 18 August 2003
Page Count: 2
Page(s): 109 - 110
ISBN (Paper): 0-7803-7830-X
DOI: 10.1109/OMEMS.2003.1233490
Regular:

This work deals with the performance of silicon photonic crystal waveguides (/spl sim/ 1.55 /spl mu/m). Initial results are presented and concepts for future MEMS-based devices are introduced.

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