IEEE - Institute of Electrical and Electronics Engineers, Inc. - Kinematics optimization for high positioning accuracy of a 4-DOF parallel manipulator for semiconductor applications

Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

Author(s): J.W.F. Cheung ; Y.S. Hung
Sponsor(s): IEEE Ind. Electron. Soc.(IES)
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kobe, Japan, Japan
Conference Date: 20 July 2003
Volume: 2
Page Count: 6
ISBN (Paper): 0-7803-7759-1
DOI: 10.1109/AIM.2003.1225523
Regular:

The end-effector kinematics error of a manipulator is caused by variations in machining accuracy of linkages. In most manipulators, the structural design results in an error magnification from the... View More

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