IEEE - Institute of Electrical and Electronics Engineers, Inc. - Angular accelerometer with dual anchor support

IEEE International Solid-State Sensors and Actuators Conference

Author(s): G.J. O'Brien ; D.J. Monk ; K. Najafi
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Boston, MA, USA, USA
Conference Date: 8 June 2003
Volume: 2
Page Count: 4
ISBN (Paper): 0-7803-7731-1
DOI: 10.1109/SENSOR.2003.1217029
Regular:

An angular accelerometer is demonstrated in 6 /spl mu/m thick silicon-on-insulator (SOI) with improved cross axis rejection using a dual anchor scheme. Dual anchor distribution is... View More

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