IEEE - Institute of Electrical and Electronics Engineers, Inc. - Negative capacitance for control of gap-closing electrostatic actuators

IEEE International Solid-State Sensors and Actuators Conference

Author(s): J.I. Seeger ; B.E. Boser
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Boston, MA, USA, USA
Conference Date: 8 June 2003
Volume: 1
Page Count: 4
ISBN (Paper): 0-7803-7731-1
DOI: 10.1109/SENSOR.2003.1215359
Regular:

Negative capacitance extends the stable range of a gap-closing actuator beyond the voltage-controlled and the charge-controlled limits. One parallel-plate actuator design stably deflects more than... View More

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