IEEE - Institute of Electrical and Electronics Engineers, Inc. - A reliable test key for thin film mechanical properties characterization

IEEE International Solid-State Sensors and Actuators Conference

Author(s): Hsin-Chang Tsai ; J.M.-L. Tsai ; Heng-Chung Chang ; Weileun Fang
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Boston, MA, USA, USA
Conference Date: 8 June 2003
Volume: 1
Page Count: 4
ISBN (Paper): 0-7803-7731-1
DOI: 10.1109/SENSOR.2003.1215351
Regular:

In this study, a reliable test key using resonant technique to characterize the mechanical properties of thin film materials is reported. The test key consists of micromachined cantilever array... View More

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