IEEE - Institute of Electrical and Electronics Engineers, Inc. - Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

2003 Instrumentation and Measurement Technology Conference (IMTC 2003)

Author(s): L.A. Rocha ; E. Cretu ; G. de Graaf ; R.F. Wolffenbuttel
Sponsor(s): IEEE Instrum. & Meas. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Vail, Colorado, USA, USA
Conference Date: 20 May 2003
Volume: 2
Page Count: 5
ISBN (Paper): 0-7803-7705-2
ISSN (Paper): 1091-5281
DOI: 10.1109/IMTC.2003.1207942
Regular:

Capacitive accelerometers with electrostatic force feedback are widely employed, because of performance and robustness. The force feedback acts as a means for electronic modulation of the spring... View More

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