IEEE - Institute of Electrical and Electronics Engineers, Inc. - In-plane resonant cavities in InP/GaInAsP/InP with photonic crystal boundaries

International Conference on Indium Phosphide and Related Materials

Author(s): M. Mulot ; M. Qiu ; M. Swillo ; B. Jaskorzynska ; A. Talneau ; S. Anand
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Santa Barbara, CA, USA, USA
Conference Date: 12 May 2003
Page Count: 4
Page(s): 296 - 299
ISBN (Paper): 0-7803-7704-4
DOI: 10.1109/ICIPRM.2003.1205374
Regular:

In-plane cavities with photonic crystal (PhC) boundaries were fabricated into an InP/GaInAsP/InP slab waveguide structure using Ar/Cl/sub 2/ based chemically assisted ion beam etching. The... View More

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