IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrostatical coupling-spring for micro-mechanical filtering applications

2003 IEEE International Symposium on Circuits and Systems (ISCAS)

Author(s): D. Galayko ; A. Kaiser ; L. Buchaillot ; D. Collard ; C. Combi
Sponsor(s): IEEE Circuits & Syst. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Bangkok, Thailand
Conference Date: 25 May 2003
Volume: 3
ISBN (Paper): 0-7803-7761-3
DOI: 10.1109/ISCAS.2003.1205073
Regular:

This paper presents a novel method of implementing coupled resonator micro-mechanical (MEMS) filters without mechanical springs. The method proposes to use an electrostatical spring, formed by two... View More

Advertisement