IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optical processing techniques in the quality control of micromechanics

Author(s): G. Indebetouw ; T. Tschudi ; J. Steffan
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 1977
Volume: 13
Page(s): 887
ISSN (Paper): 0018-9197
ISSN (Online): 1558-1713
DOI: 10.1109/JQE.1977.1069432
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