IEEE - Institute of Electrical and Electronics Engineers, Inc. - 3D fabrication using deep X-ray mask with integrated micro-actuator

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): Kwang-Cheol Lee ; S.S. Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 558 - 561
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189810
Regular:

This paper describes a novel 3D fabrication method with single X-ray process utilizing a deep X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle... View More

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