IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of 3D microstructures with inclined/rotated UV lithography

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): M. Han ; Woonseob Lee ; Sung-Keun Lee ; S.S. Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 554 - 557
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189809
Regular:

This paper presents a novel microfabrication technology of three-dimensional (3D) microstructures with inclined/rotated UV lithography. Various 3D microstructures have been made of negative thick... View More

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