IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microfabrication of gallium arsenide cantilever for atomic force microscope application

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): N. Iwata ; T. Wakayama ; T. Kobayashi ; S. Yamada
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 550 - 553
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189808
Regular:

Recently, several researchers have reported fabrications of cantilever based on various GaAs related bulk and hetrostructure materials. But the details of fabrication processes and of mechanical... View More

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