IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of a CMOS compatible pressure sensor for harsh environments

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): L.S. Pakula ; H. Yang ; H.T.M. Pham ; P.J. French ; P.M. Sarro
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 502 - 505
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189796
Regular:

This paper presents the fabrication and characteristics of CMOS compatible absolute pressure sensors for harsh environments. The sensor consist of 100 circle membranes with total capacity of 14... View More

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