IEEE - Institute of Electrical and Electronics Engineers, Inc. - Monolithic high aspect ratio two-axis optical scanners in SOI

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): V. Milanovic ; G.A. Matus ; T. Cheng ; B. Cagdaser
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 255 - 258
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189734
Regular:

Fully monolithic silicon optical scanners are demonstrated with large static optical beam deflection in two axes. The main advantage of the scanners is their high frequency of operation for both... View More

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