IEEE - Institute of Electrical and Electronics Engineers, Inc. - A solder self-assembled torsional micromirror array

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): B. McCarthy ; V.M. Bright ; J.A. Neff
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 215 - 218
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189724
Regular:

Although numerous single micromirror designs have been demonstrated in the literature, some applications require a mirror array with the individual mirrors integrated into a single frame. This... View More

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