IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling spring

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): D. Galayko ; A. Kaiser ; L. Buchaillot ; D. Collard ; C. Combi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 153 - 156
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189709
Regular:

This paper describes the theory, design and test of a novel architecture of highly-selective micromechanical filters employing electrostatically coupled resonators with floating or biased coupling... View More

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