IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel electrostatic vertical comb actuator fabricated on [111] silicon wafer

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): C.C. Chu ; J.M. Tsai ; J. Hsieh ; W. Fang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 56 - 59
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189686
Regular:

In this study, a novel electrostatic vertical comb actuator (VCA) is designed and fabricated on a [111] silicon substrate. The BELST process was exploited to fabricate the proposed VCA. Three... View More

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