IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nanomechanics of ultrathin silicon beams and carbon nanotubes

Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Author(s): T. Ono ; D. Wang ; S. Sugimoto ; H. Miyashita ; M. Esashi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Kyoto, Japan, Japan
Conference Date: 23 January 2003
Page Count: 4
Page(s): 33 - 36
ISBN (Paper): 0-7803-7744-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2003.1189680
Regular:

The nanomechanical properties of single-crystalline silicon cantilevers and carbon nanotubes, as a resonating element are investigated. As the dimensions of a resonating mechanical structure... View More

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