IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Grounded Co-Planar Waveguide MEMS Switch

2003 33rd European Microwave Conference, 2003

Author(s): Kenichi Miyaguchi ; Yukihisa Yoshida ; Tamotsu Nishino ; Masatake Hangai ; Yoshiyuki Suehiro ; Sang-Seok Lee ; Akio Iida ; Osami Ishida
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2003
Conference Location: Munich, Germany, Germany
Conference Date: 2 October 2003
Page(s): 667 - 670
ISBN (Paper): 1-58053-834-7
DOI: 10.1109/EUMA.2003.341041
Regular:

A grounded co-planar waveguide (GCPW) MEMS switch is presented. The proposed switch has a movable SiN membrane with a signal line and ground lines above a dielectric-air-metal (DAM) cavity... View More

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