IEEE - Institute of Electrical and Electronics Engineers, Inc. - Refurbishment of epoxy accelerator column bushings

Proceedings of the 2002 14th International Conference on Ion Implantation Technology

Author(s): Peebles, H. ; Bishop, S.
Sponsor(s): IEEE Circuits & Syst. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2002
Conference Location: Taos, New Mexico, USA, USA
Conference Date: 22 September 2002
Page Count: 4
Page(s): 444 - 447
ISBN (Paper): 0-7803-7155-0
DOI: 10.1109/IIT.2002.1258036
Regular:

This paper describes a new cleaning process developed for the refurbishment of the large epoxy bushings used as high voltage insulators in the source and accelerator columns of ion implant tools.... View More

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