IEEE - Institute of Electrical and Electronics Engineers, Inc. - Dose reproducibility in Axcelis GSD implanters using Stabil-Ion gauge

Proceedings of the 2002 14th International Conference on Ion Implantation Technology

Author(s): Johnson, R.C. ; Tysinger, R.
Sponsor(s): IEEE Circuits & Syst. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2002
Conference Location: Taos, New Mexico, USA, USA
Conference Date: 22 September 2002
Page Count: 3
Page(s): 350 - 352
ISBN (Paper): 0-7803-7155-0
DOI: 10.1109/IIT.2002.1258012
Regular:

Long-term dose reproducibility and tool to tool dose matching in the Axcelis GSD end-station is critically dependent on process chamber pressure measurement and Pressure Compensation factor... View More

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