IEEE - Institute of Electrical and Electronics Engineers, Inc. - Charging effects on medium current implanter on CMOS and mixed signal IC's

Proceedings of the 2002 14th International Conference on Ion Implantation Technology

Author(s): Gandy, T.H. ; Sargunas, V. ; Singh, A. ; Taduri, S. ; Thiefain, P. ; Ameen, M.S. ; Rathmell, R.
Sponsor(s): IEEE Circuits & Syst. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2002
Conference Location: Taos, New Mexico, USA, USA
Conference Date: 22 September 2002
Page Count: 4
Page(s): 299 - 302
ISBN (Paper): 0-7803-7155-0
DOI: 10.1109/IIT.2002.1257998
Regular:

Stringent process performance requirements for advanced devices have led to hardware specifically optimized for low metal contamination and particle contribution during implants and wafer... View More

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