IEEE - Institute of Electrical and Electronics Engineers, Inc. - SIMS analysis of small area device samples

Proceedings of the 2002 14th International Conference on Ion Implantation Technology

Author(s): Sams, D.B. ; Wang, L. ; Wang, A. ; Sheng, J.
Sponsor(s): IEEE Circuits & Syst. Soc
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2002
Conference Location: Taos, New Mexico, USA, USA
Conference Date: 22 September 2002
Page Count: 4
Page(s): 272 - 275
ISBN (Paper): 0-7803-7155-0
DOI: 10.1109/IIT.2002.1257991
Regular:

As device dimensions decrease and wafer real estate increases in value, it becomes ever more important to conserve the space dedicated to test structures. As devices become more complex, it... View More

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