IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Low Cost Digital Controller for an Electron Lithography System using a Scanning Electron Microscope

Author(s): D. G. Seiler ; C. K. Campbell ; M. S. Suthers
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 1976
Volume: IECI-23
Page(s): 325 - 328
ISSN (Paper): 0018-9421
DOI: 10.1109/TIECI.1976.351401
Regular:

A low-cost digital controller is described for use in the generation of lithographic patterns with a scanning electron microscope, for microcircuit fabrication over 100 um x 100 um pattern fields.... View More

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