IEC - International Electrotechnical Commission - IEC 62047-44:2024
Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 22 February 2024 |
| Status: | published |
| Page Count: | 19 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechan
Document History
IEC 62047-44:2024
February 22, 2024
Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant...