IEC - International Electrotechnical Commission - IEC 62047-44:2024

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

published
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Organization: IEC - International Electrotechnical Commission
Publication Date: 22 February 2024
Status: published
Page Count: 19
ICS Code (Other semiconductor devices): 31.080.99
abstract:

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant... View More

Document History

IEC 62047-44:2024
February 22, 2024
Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant...
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