IEC - International Electrotechnical Commission - IEC 63229:2021
Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 7 April 2021 |
| Status: | published |
| Page Count: | 21 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 63229:2021(E) gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate. They are identified and described on the basis of examples, mainly... View More
Document History
IEC 63229:2021
April 7, 2021
Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate
IEC 63229:2021(E) gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate. They are identified and described on the basis of examples, mainly by...