IEC TR 63283-1:2022(E) is to compile a comprehensive collection of base terminology with compatible terms that can become relevant within the scope of Smart Manufacturing. Most of these terms refer to existing definitions in the domain of industrial-process measurement, control and automation and its various subdomains. When multiple similar definitions exist for the exact same term in different standards, this document contains only the preferred definition in the context of Smart Manufacturing. Whenever the existing definitions are not compatible with other terms in this document or when the definition does not fit into the broader scope of Smart Manufacturing, new or modified definitions are given.