IEC - International Electrotechnical Commission - IEC TR 63258:2021
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 19 March 2021 |
| Status: | published |
| Page Count: | 21 |
| ICS Code (Nanotechnologies): | 07.120 |
abstract:
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the... View More
Document History
IEC TR 63258:2021
March 19, 2021
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the...