IEEE - Institute of Electrical and Electronics Engineers, Inc. - GaAs photonic crystals on SiO/sub 2/ fabricated by VHF anode-coupled RIE and wafer bonding

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

Author(s): T. Saitoh ; T. Sogawa ; M. Notomi ; T. Tamamura ; S. Kodama ; T. Furuta ; H. Ando
Sponsor(s): Japan Soc. of Appl. Phys.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Yokohama, Japan, Japan
Conference Date: 6 July 1999
Page Count: 2
Page(s): 22 - 23
ISBN (Paper): 4-930813-97-2
DOI: 10.1109/IMNC.1999.797457
Regular:

Semiconductor photonic crystals (PCs) are attracting much attention from the viewpoints of both physical interest and optoelectronic applications that take advantage of controlling optical... View More

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