IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics

Author(s): Ssu-Han Chen ; Aron Michael ; Chee Yee Kwok
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2019
Volume: 28
Page(s): 919 - 932
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2935007
Regular:

This paper presents the design and modeling of a novel piezoelectrically driven micro-lens actuator capable of delivering large out-of-plane displacement with a low driving voltage and fast speed.... View More

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