IEEE - Institute of Electrical and Electronics Engineers, Inc. - Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage

Author(s): Yingxiang Liu ; Jie Deng ; Qi Su
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2018
Volume: 6
Page(s): 59,986 - 60,004
ISSN (Electronic): 2169-3536
DOI: 10.1109/ACCESS.2018.2875940
Regular:

Multi-degree-of-freedom (multi-DOF) piezoelectric motion stage is an important part of modern manufacturing industry. In order to perform high precision outputs in a large travel range,... View More

Advertisement