IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachined Thermopile Based High Heat Flux Sensor

Author(s): Wei Tian ; Yi Wang ; Hong Zhou ; Yuelin Wang ; Tie Li
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 7
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2019.2948645
Regular:

Transient heat flux sensors are widely used in unsteady thermal analyses. Commercial sensors currently available for high heat flux, however, have relatively low sensitivity. Micromachined... View More

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