IEEE - Institute of Electrical and Electronics Engineers, Inc. - Exergy Approach to the Assessment of a Multistage Air Filtration System for Clean Rooms

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

Author(s): Phyo Thu ; Thein Htut Oo ; Artem N. Zaharov ; Andrey S. Ryabyshenkov ; Nikolay M. Larionnov
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2019
Conference Location: Saint Petersburg and Moscow, Russia, Russia
Conference Date: 28 January 2019
Page(s): 2,237 - 2,240
ISBN (CD): 978-1-7281-0338-9
ISBN (Electronic): 978-1-7281-0339-6
ISSN (Electronic): 2376-6565
DOI: 10.1109/EIConRus.2019.8657139
Regular:

When implementing precision microelectronic processes, clean rooms which are characterized by different classes of purity are needed. At present one of the conditions for the successful... View More

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