IEEE - Institute of Electrical and Electronics Engineers, Inc. - Static Modeling of Bending Characteristics on V-Shaped Beam Actuator Based on Flexible Substrate

Author(s): Lei Han ; Yang Yu ; Ruijie Qin ; Zhiqiang Zhang ; Shi Su
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 6
ISSN (Electronic): 1557-9646
ISSN (Paper): 0018-9383
DOI: 10.1109/TED.2019.2949632
Regular:

Due to the unique properties of flexible electronic devices, various microelectromechanical systems (MEMS) devices based on flexible substrate have been proposed for miniaturization,... View More

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