IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Front-Side Microfabricated Tiny-Size Thermopile Infrared Detector With High Sensitivity and Fast Response

Author(s): Wei Li ; Zao Ni ; Jiachou Wang ; Xinxin Li
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2019
Volume: 66
Page(s): 2,230 - 2,237
ISSN (Electronic): 1557-9646
ISSN (Paper): 0018-9383
DOI: 10.1109/TED.2019.2903589
Regular:

This paper reports a novel tiny-sized (116 μm × 134 μm) single-crystalline silicon/aluminum infrared (IR) thermopile detector, which is micromachined only from the front side of (111)... View More

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