IEEE - Institute of Electrical and Electronics Engineers, Inc. - Improvement of Endurance in HZO-based Ferroelectric Capacitor Using Ru Electrode

Author(s): Rongrong Cao ; Bing Song ; Dashan Shang ; Yang Yang ; Qing Luo ; Shuyu Wu ; Yue Li ; Yan Wang ; Hangbing Lv ; Qi Liu ; Ming Liu
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2944960
Regular:

In this letter, the endurance property of Hf0.5Zr0.5O2 (HZO) based ferroelectric capacitor has been improved using Ru electrodes. Compared to the widely used TiN/HZO/TiN capacitor, the Ru/HZO/Ru... View More

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