IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultra-Low Acoustic Loss Micro-Machined Butterfly Lamb Wave Resonators on AlN Plates

Author(s): J. Zou ; A. Gao ; Albert P. Pisano
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2019.2945235
Regular:

This study reports the design of a novel Butterfly Lamb wave resonator (LWR) employing S0 mode in AlN plate, and for the first time, its ultra-high parallel-resonance quality factor (Qp) of 4,021... View More

Advertisement