IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Wafer Map Yield Prediction Based on Machine Learning for Productivity Enhancement

Author(s): Sung-Ju Jang ; Jong-Seong Kim ; Tae-Woo Kim ; Hyun-Jin Lee ; Seung Bum Ko
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2945482
Regular:

Manufacturing productivity in the semiconductor industry is a key factor in determining the competitiveness of manufacturers. In order to enhance productivity, evaluating the productivity of wafer... View More

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