IEEE - Institute of Electrical and Electronics Engineers, Inc. - The long journey from standardization to fully fab automation and more

Author(s): Harald Heinrich ; Arthur Deutschlander ; Feryel Zoghlami ; Okan Kamil Sen
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2945352
Regular:

This paper describes our long journey from the first standardization projects to support a fully automated work flow to three complex automation hardware projects, including learnings about change... View More

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