IEEE - Institute of Electrical and Electronics Engineers, Inc. - 300-mm Monolithic Silicon Photonics Foundry Technology

Author(s): Ken Giewont ; Shuren Hu ; Bo Peng ; Michal Rakowski ; Stewart Rauch ; Jessie C. Rosenberg ; Asli Sahin ; Ian Stobert ; Andy Stricker ; Karen Nummy ; Frederick A. Anderson ; Javier Ayala ; Tymon Barwicz ; Yusheng Bian ; Kevin K. Dezfulian ; Douglas M. Gill ; Thomas Houghton
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2019
Volume: 25
Page(s): 1 - 11
ISSN (Electronic): 1558-4542
ISSN (Paper): 1077-260X
DOI: 10.1109/JSTQE.2019.2908790
Regular:

A competitive 300-mm silicon photonics foundry technology has been developed by GLOBALFOUNDRIES for general availability, which takes advantage of advanced CMOS process technology and provides a... View More

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