IEEE - Institute of Electrical and Electronics Engineers, Inc. - Monolithic Integration of Al2O3 and Si3N4 Toward Double-Layer Active–Passive Platform

Author(s): Jinfeng Mu ; Meindert Dijkstra ; Yean-Sheng Yong ; Michiel de Goede ; Lantian Chang ; Sonia M. Garcia-Blanco
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2019
Volume: 25
Page(s): 1 - 11
ISSN (Electronic): 1558-4542
ISSN (Paper): 1077-260X
DOI: 10.1109/JSTQE.2019.2908559
Regular:

Low-cost, high-performance integration technologies are instrumental for active-passive integrated photonics devices. The monolithic integration of Al2O3 and... View More

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