IEEE - Institute of Electrical and Electronics Engineers, Inc. - Accurate and Fast On-Wafer Test Circuitry for Device Array Characterization in Wafer Acceptance Test

Author(s): Hao-Chiao Hong ; Long-Yi Lin
Sponsor(s): IEEE Circuits and Systems Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2019
Volume: 66
Page(s): 3,467 - 3,479
ISSN (Electronic): 1558-0806
ISSN (Paper): 1549-8328
DOI: 10.1109/TCSI.2019.2924251
Regular:

This paper proposes an on-wafer test circuitry for rapidly and accurately characterizing the devices under tests (DUTs) of the DUT array in the wafer acceptance test (WAT) to qualify wafers faster... View More

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