IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of Nonlinear electromechanical coupled Macro model for Electrostatic MEMS cantilever beam

Author(s): Akanksha D. Singh ; Rajendra M. Patrikar
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 2169-3536
DOI: 10.1109/ACCESS.2019.2943422
Regular:

The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. These devices are usually interfaced with electronic circuits. It is... View More

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