IEEE - Institute of Electrical and Electronics Engineers, Inc. - 3D MEMS in-chip solenoid inductor with high inductance density for Power MEMS device

Author(s): Tiantong Xu ; Jiamian Sun ; Hanxiao Wu ; Haiwang Li ; Hanqing Li ; Zhi Tao
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2019.2941003
Regular:

In this letter, we report the design and measurement of a 3D solenoid inductor that is embedded in a Si substrate and can integrate an iron core. Various inductor designs were fabricated with good... View More

Advertisement