IEEE - Institute of Electrical and Electronics Engineers, Inc. - Prediction of the Number of Defects in Image Sensors by VM using Equipment QC Data

Author(s): Toshiya Okazaki ; Kosuke Okusa ; Kyo Yoshida
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2941585
Regular:

This paper describes methods and evaluation results of predicting the number of defects in image sensors using equipment QC data. Virtual metrology (VM) models are mainly used for measurable... View More

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