IEEE - Institute of Electrical and Electronics Engineers, Inc. - AdaBalGAN: An Improved Generative Adversarial Network With Imbalanced Learning for Wafer Defective Pattern Recognition

Author(s): Junliang Wang ; Zhengliang Yang ; Jie Zhang ; Qihua Zhang ; Wei-Ting Kary Chien
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2019
Volume: 32
Page(s): 310 - 319
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2925361
Regular:

Identification of the defective patterns of the wafer maps can provide insights for the quality control in the semiconductor wafer fabrication systems (SWFSs). In real SWFSs, the collected wafer... View More

Advertisement