IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precision Polishing of Single Crystal Diamond (111) Substrates Using a Sol-Gel (SG) Polishing Pad

Author(s): Jing Lu ; Ping Xiao ; Ruilong Tong ; Qiufa Luo ; Xipeng Xu
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2019
Volume: 32
Page(s): 341 - 345
ISSN (Electronic): 1558-2345
ISSN (Paper): 0894-6507
DOI: 10.1109/TSM.2019.2921873
Regular:

In recent years, the application prospect of single crystal diamond (SCD) in the field of electronics is remarkable, and material processing technologies are the basis for the application of... View More

Advertisement